Silicon carbide (SiC) is widely recognized as the leading candidate to replace silicon in micro-electro-mechanical systems devices operating in harsh environments. In this work, cantilevers and bridges in SiC are designed, fabricated and evaluated …
Silicon carbide (SiC) is widely recognised as the leading candidate to replace silicon inMicro ElectroMechanicalSystems (MEMS) operating in harsh environments. In thiswork, cantilevers and bridges in polySiCare designed, fabricated and evaluated …
Silicon carbide (SiC) is widely recognised as the leading candidate to replace silicon in Micro Electro-Mechanical Systems (MEMS) devices operating in harsh environments. In this work, cantilevers and bridges in SiC are designed, fabricated and …
Amplification techniques for piezoelectric actuation are briefly reviewed and an unlatching impact piezo-actuator then proposed. In such a device, a piezoelectric multilayer has the function of imparting kinetic energy to a mass connected to an …
Micromachines can be built only with the aid of other machines that have micropositioning abilities. Fast and precise positioning devices are needed to increase reliability and speed in the production of the miniaturized devices. Intensive research …
Piezoelectric multilayer actuators have long established their supremacy in precise positioning applications. Apart from very accurate position control, piezoelectric actuators provide fast actuation with low energy requirements; these valuable …